Cu target broken & target B mount damaged

Sung-Woo Kim toadking at
Tue Feb 15 23:27:08 PST 2005


I deposited 140nm Cu on 3 wafers tonight.

Before the deposition, it looked perfect

However, the target's been broken and the mount seems damaged after the

I'm sorry about that.

Can you let me know what I should do?



Sung-Woo Kim


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