Cu target broken & target B mount damaged

Sung-Woo Kim toadking at stanford.edu
Tue Feb 15 23:27:08 PST 2005


Jeannie,

I deposited 140nm Cu on 3 wafers tonight.

Before the deposition, it looked perfect

However, the target's been broken and the mount seems damaged after the
sputtering.

I'm sorry about that.

Can you let me know what I should do?

 

Regards,

Sung-Woo Kim

 

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