thin Au films

Morgan Mager mager at
Mon Oct 16 13:29:54 PDT 2006

   I'm intested in depositing thin (~10nm) gold films with the metalica
sputtering system. Does anyone have experience or tips for this? Is it
possible to lower the power to lower the dep rate and, if so, by how much?
What about uniformity? Any information would be useful. Thanks.


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