[metalica] Cannot turn on the output

Ashish Pal apal at stanford.edu
Sun Mar 31 19:48:41 PDT 2013


Hi,

I was not able to turn on the output in metalica during my deposition today. The "ON" LED did not turn on and there was no plasma/depostion.

I reported a problem in badger for this.

When I came to use the equipment today, I saw the roughing pump on with the roughing valve open. From the reservation history I see that nobody has used Metalica for 2 days, so the equipment was in that state for 2 days.

Best Regards
Ashish



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