From lindaw at snf.stanford.edu Wed Apr 4 08:51:01 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Apr 4, 2001 8:51:01 AM Subject: Shutdown mrc 2001-04-04 08:50:59: motor went crazy Message-ID: I was spinning a wafer at 2K rpm when the spin speed started getting erratic, and then halfway through shot up to 6500 rpm, even with the adjustment knob set at zero. I removed my wafer and stried spinning a dummy, and the motor won't spin at all now. From latta at snf.stanford.edu Wed Apr 4 10:08:49 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Apr 4, 2001 10:08:49 AM Subject: Shutdown mrc 2001-04-04 08:50:59: motor went crazy Message-ID: Ahh.. wrong machine shutdown. Meassge was meant of headway.... From gmclean at snf.stanford.edu Thu Apr 12 08:43:12 2001 From: gmclean at snf.stanford.edu (gmclean at snf.stanford.edu) Date: Apr 12, 2001 8:43:12 PM Subject: Problem mrc 2001-04-12 20:43:09: mrc peak voltage meter reads zero Message-ID: The peak voltage meter on the mrc machine does not register anything when the RF power is turned up. The forward power suggests that a plasma has been struck, but there is no glow in thechamber, and etching does not progress. I was attempting a sputter etch using 10 sccm Ar at 10 mT, I turned the forward power up to 100W and tuned the reflected power down to about 5W, but could not see any glow through the window. I ran in this condition for over an hour without seeing any evidence of etching of my sample. From cbaxter at snf.stanford.edu Thu Apr 12 09:42:08 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 12, 2001 9:42:08 PM Subject: Problem mrc 2001-04-12 20:43:09: mrc peak voltage meter reads zero Message-ID: From mcvittie at cis.Stanford.EDU Fri Apr 13 00:42:43 2001 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Fri, 13 Apr 2001 00:42:43 -0700 (PDT) Subject: Problem mrc 2001-04-12 20:43:09: mrc peak voltage meter reads zero In-Reply-To: <200104130343.f3D3hJW11353@leland2.Stanford.EDU> Message-ID: gmclean, There appears to be a mode in the MRC where there is no plasma above the wafer. There is probably an arc occuring between the side of the wafer electrode and the ground dark shield that surrounds the electrode. THe last time I saw this occurring, I got it to go away by cleaning the slot the that the stainless steel dark shield sits in. I think that particles get in the slot and keep it from making a good ground connection which allows an arc mode rather the normal plasma mode. Jim -------------------------------------------------------------- James P. McVittie Senior Research Scientist Allen Center for Integrated Systems jmcvittie at stanford.edu Stanford University Tel: (650) 725-3640 Rm. 336, 330 Serra Mall Fax: (650) 723-4659 Stanford, CA 94305-4075 On 12 Apr 2001 gmclean at snf.stanford.edu wrote: > The peak voltage meter on the mrc machine does not register anything > when the RF power is turned up. The forward power suggests that a > plasma has been struck, but there is no glow in thechamber, and > etching does not progress. I was attempting a sputter etch using 10 > sccm Ar at 10 mT, I turned the forward power up to 100W and tuned the > reflected power down to about 5W, but could not see any glow through > the window. I ran in this condition for over an hour without seeing > any evidence of etching of my sample. > > From yangxu at snf.stanford.edu Tue Apr 24 03:28:05 2001 From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu) Date: Apr 24, 2001 3:28:05 AM Subject: Problem mrc 2001-04-24 03:28:04: RF power lost Message-ID: After two successful 10 minutes etchings, the RF Peak Voltage stays at 0 when incresing the RF power. No plasma and no etching. From lindaw at snf.stanford.edu Tue Apr 24 11:41:10 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Apr 24, 2001 11:41:10 AM Subject: Comment mrc 2001-04-24 11:41:09: rf power is working just fine!!! Message-ID: From cbaxter at snf.stanford.edu Tue Apr 24 06:15:57 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 24, 2001 6:15:57 PM Subject: Problem mrc 2001-04-24 03:28:04: RF power lost Message-ID: inductor and cap was out of phase. was able to tune @ 100watt forward power with Ar gas. From latta at snf.stanford.edu Thu Apr 26 12:31:58 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Apr 26, 2001 12:31:58 PM Subject: Shutdown mrc 2001-04-26 12:31:57: Won't pump below 90mT Message-ID: Hissing sound- from basement? From cbaxter at snf.stanford.edu Thu Apr 26 05:15:53 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 26, 2001 5:15:53 PM Subject: Shutdown mrc 2001-04-26 12:31:57: Won't pump below 90mT Message-ID: air line for the roughing gate valve came off.