Problem mrc 2001-04-24 03:28:04: RF power lost

yangxu at snf.stanford.edu yangxu at snf.stanford.edu
Tue Apr 24 03:28:05 PDT 2001


After two successful 10 minutes etchings, the RF Peak Voltage stays at 0 when incresing the RF power. No plasma and no etching. 




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