From cbaxter at snf.stanford.edu Tue Jan 23 08:20:56 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 23, 2001 8:20:56 PM Subject: Shutdown mrc 2000-11-21 20:26:43: leak... Message-ID: installed new quartz insulator. chamber base with rough @10m/t and dp opened base at 0.. From bchui at snf.stanford.edu Mon Jan 29 11:49:15 2001 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Jan 29, 2001 11:49:15 AM Subject: Problem mrc 2001-01-29 11:49:14: Gate valve stuck Message-ID: Gate valve is stuck. Will rotate only by half a rotation. From booth at snf.stanford.edu Mon Jan 29 01:12:55 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 29, 2001 1:12:55 PM Subject: Problem mrc 2001-01-29 11:49:14: Gate valve stuck Message-ID: checked gate vavle - working normally. From latta at snf.stanford.edu Mon Jan 29 03:55:59 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 29, 2001 3:55:59 PM Subject: Problem mrc 2001-01-29 15:55:58: Leak up rate is about 60mT/min Message-ID: From cbaxter at snf.stanford.edu Mon Jan 29 04:39:51 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 29, 2001 4:39:51 PM Subject: Problem mrc 2001-01-29 15:55:58: Leak up rate is about 60mT/min Message-ID: cleaned top chamber oirng and pump down chamber for 30mins l/r @ 30m/t per min From kcheng at snf.stanford.edu Tue Jan 30 05:48:22 2001 From: kcheng at snf.stanford.edu (kcheng at snf.stanford.edu) Date: Jan 30, 2001 5:48:22 PM Subject: Problem mrc 2001-01-30 17:48:21: MRC leak Message-ID: MRC is not pumping down efficiently with gate valve fully open. The Oxygen plasma color is red, instead of light blue as well. From cbaxter at snf.stanford.edu Tue Jan 30 07:28:19 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 30, 2001 7:28:19 PM Subject: Problem mrc 2001-01-30 17:48:21: MRC leak Message-ID: DP was low on oil. add DP oil. leak rate is @ 35m/t per min. From txx at snf.stanford.edu Wed Jan 31 10:56:31 2001 From: txx at snf.stanford.edu (txx at snf.stanford.edu) Date: Jan 31, 2001 10:56:31 AM Subject: Problem mrc 2001-01-31 10:56:30: Message-ID: pink color in O2 Plasma --> leakage