From grupp at snf.stanford.edu  Wed Jul 17 02:13:37 2002
From: grupp at snf.stanford.edu (grupp at snf.stanford.edu)
Date: Jul 17, 2002 2:13:37 AM
Subject: Problem mrc 2002-07-17 02:13:36: No cooling water!
Message-ID: <mailman.52.1356282581.4282.mrc-pcs@snf.stanford.edu>

cooling water lines are empty. I could really use the coolth.
Thanks,
Dan Grupp



From mdickey at snf.stanford.edu  Wed Jul 17 07:31:37 2002
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Jul 17, 2002 7:31:37 AM
Subject: Shutdown mrc 2002-07-17 07:31:36: Pump check
Message-ID: <mailman.53.1356282581.4282.mrc-pcs@snf.stanford.edu>

shutting down the system to add oil to the mechanical pump



From booth at snf.stanford.edu  Wed Jul 17 12:53:23 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 17, 2002 12:53:23 PM
Subject: Shutdown mrc 2002-07-17 12:53:23: Electrode chiller has failed
Message-ID: <mailman.54.1356282581.4282.mrc-pcs@snf.stanford.edu>

Chiller will be sent out for repair.



From booth at snf.stanford.edu  Wed Jul 17 12:54:05 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 17, 2002 12:54:05 PM
Subject: Problem mrc 2002-07-17 02:13:36: No cooling water!
Message-ID: <mailman.55.1356282581.4282.mrc-pcs@snf.stanford.edu>

chiller must be repaired.  Changed to Shutdown.



From booth at snf.stanford.edu  Wed Jul 17 12:54:40 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 17, 2002 12:54:40 PM
Subject: Shutdown mrc 2002-07-17 07:31:36: Pump check
Message-ID: <mailman.56.1356282581.4282.mrc-pcs@snf.stanford.edu>

demister changed & fomblin 14/6 added to
vane pump.



From booth at snf.stanford.edu  Wed Jul 17 03:54:06 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 17, 2002 3:54:06 PM
Subject: Shutdown mrc 2002-07-17 12:53:23: Electrode chiller has failed
Message-ID: <mailman.57.1356282581.4282.mrc-pcs@snf.stanford.edu>

allowing Dan Grupp to use system for short etch
without cooling.



From booth at snf.stanford.edu  Wed Jul 17 03:54:44 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 17, 2002 3:54:44 PM
Subject: Problem mrc 2002-07-17 15:54:43: No electrode cooling
Message-ID: <mailman.58.1356282581.4282.mrc-pcs@snf.stanford.edu>

Chiller has failed, sent out for repair.



From grupp at snf.stanford.edu  Wed Jul 17 06:51:57 2002
From: grupp at snf.stanford.edu (grupp at snf.stanford.edu)
Date: Jul 17, 2002 6:51:57 PM
Subject: Shutdown mrc 2002-07-17 18:51:56: no cooling water
Message-ID: <mailman.59.1356282581.4282.mrc-pcs@snf.stanford.edu>




From mcvittie at snf.stanford.edu  Fri Jul 19 05:08:56 2002
From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu)
Date: Jul 19, 2002 5:08:56 PM
Subject: Shutdown mrc 2002-07-17 18:51:56: no cooling water
Message-ID: <mailman.60.1356282581.4282.mrc-pcs@snf.stanford.edu>

Cooling water is still not repair. Putting etcher on line for short test.   Jim 



From booth at snf.stanford.edu  Mon Jul 22 09:27:36 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 22, 2002 9:27:36 AM
Subject: Shutdown mrc 2002-07-22 09:27:35: Chiller out for repair
Message-ID: <mailman.61.1356282581.4282.mrc-pcs@snf.stanford.edu>




From rcrane at snf.stanford.edu  Mon Jul 22 11:59:01 2002
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Jul 22, 2002 11:59:01 AM
Subject: Shutdown mrc 2002-07-22 09:27:35: Chiller out for repair
Message-ID: <mailman.62.1356282581.4282.mrc-pcs@snf.stanford.edu>

Up for testing without chiller



From cbaxter at snf.stanford.edu  Mon Jul 22 07:19:50 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jul 22, 2002 7:19:50 PM
Subject: Problem mrc 2002-07-17 15:54:43: No electrode cooling
Message-ID: <mailman.63.1356282581.4282.mrc-pcs@snf.stanford.edu>

installed chiller that came off from the stsetch