From booth at snf.stanford.edu  Wed Sep 18 06:51:37 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Sep 18, 2002 6:51:37 AM
Subject: Shutdown mrc 2002-09-18 06:51:36: electrical work in basement
Message-ID: <mailman.64.1356282581.4282.mrc-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed Sep 18 04:41:09 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sep 18, 2002 4:41:09 PM
Subject: Shutdown mrc 2002-09-18 06:51:36: electrical work in basement
Message-ID: <mailman.65.1356282581.4282.mrc-pcs@snf.stanford.edu>

tool is back online



From crichter at snf.stanford.edu  Thu Sep 26 04:53:50 2002
From: crichter at snf.stanford.edu (crichter at snf.stanford.edu)
Date: Sep 26, 2002 4:53:50 PM
Subject: Problem mrc 2002-09-26 16:53:50: chip with cured PDMS fell in narrow opening
Message-ID: <mailman.66.1356282581.4282.mrc-pcs@snf.stanford.edu>

a small chip fell into a narrow slit between electrode and metal cylinder



From cbaxter at snf.stanford.edu  Thu Sep 26 07:03:08 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sep 26, 2002 7:03:08 PM
Subject: Problem mrc 2002-09-26 16:53:50: chip with cured PDMS fell in narrow opening
Message-ID: <mailman.67.1356282581.4282.mrc-pcs@snf.stanford.edu>

recovered wafer chips