From cshen at snf.stanford.edu  Tue Apr 15 03:10:22 2003
From: cshen at snf.stanford.edu (cshen at snf.stanford.edu)
Date: Apr 15, 2003 3:10:22 PM
Subject: Problem mrc 2003-04-15 15:10:22: Report Problem for mrc
Message-ID: <mailman.78.1356282581.4282.mrc-pcs@snf.stanford.edu>

Each time STS is runing, the gas flow of SF6 in MRC fluctuates significantly when the plasma in STS flashes. This problem has existed since I started to use MRC a few months ago, and creates significant inconsistency in etching..
I'm using 20sccm SF6 in MRC, pressure is about 6mTorr. The program running in STS is SHER2. 



From cbaxter at snf.stanford.edu  Wed Apr 16 06:18:18 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Apr 16, 2003 6:18:18 PM
Subject: Problem mrc 2003-04-15 15:10:22: Report Clear for mrc
Message-ID: <mailman.79.1356282581.4282.mrc-pcs@snf.stanford.edu>

adjusted gain on the gas flow controller. checked 10,20,30
40,50,60,70,80 and 90 sccm flow and they are stable



From cshen at snf.stanford.edu  Fri Apr 18 02:54:53 2003
From: cshen at snf.stanford.edu (cshen at snf.stanford.edu)
Date: Apr 18, 2003 2:54:53 PM
Subject: Problem mrc 2003-04-18 14:54:53: Report Problem for mrc
Message-ID: <mailman.80.1356282581.4282.mrc-pcs@snf.stanford.edu>

SF6 flow rate still unstable when STS is running. 
Please refer to my previous report a few days ago for detailed info.



From cbaxter at snf.stanford.edu  Fri Apr 18 03:07:35 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Apr 18, 2003 3:07:35 PM
Subject: Problem mrc 2003-04-18 14:54:53: Report Clear for mrc
Message-ID: <mailman.81.1356282581.4282.mrc-pcs@snf.stanford.edu>

checked sf6 while stsetch is running sf6 is stable,
anyway adjusted gain.



From cshen at snf.stanford.edu  Thu Apr 24 10:59:12 2003
From: cshen at snf.stanford.edu (cshen at snf.stanford.edu)
Date: Apr 24, 2003 10:59:12 AM
Subject: Problem mrc 2003-04-24 10:59:11: Report Problem for mrc
Message-ID: <mailman.82.1356282581.4282.mrc-pcs@snf.stanford.edu>

SF6 flow rate still fluctuates significantly when STS is running. 
This makes the etch very inconsistant.
Is it possible to seperate the power supply of MRC far away from the STS?
Thanks for your attention.



From booth at snf.stanford.edu  Thu Apr 24 11:04:03 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 24, 2003 11:04:03 AM
Subject: Problem mrc 2003-04-24 10:59:11: Report Clear for mrc
Message-ID: <mailman.83.1356282581.4282.mrc-pcs@snf.stanford.edu>

testing is in progress.  We are looking
for solutions to this problem.