Problem mrc 2003-04-15 15:10:22: Report Problem for mrc

cshen at snf.stanford.edu cshen at snf.stanford.edu
Tue Apr 15 03:10:22 PDT 2003


Each time STS is runing, the gas flow of SF6 in MRC fluctuates significantly when the plasma in STS flashes. This problem has existed since I started to use MRC a few months ago, and creates significant inconsistency in etching..
I'm using 20sccm SF6 in MRC, pressure is about 6mTorr. The program running in STS is SHER2. 




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