Problem mrc 2003-04-24 10:59:11: Report Problem for mrc

cshen at snf.stanford.edu cshen at snf.stanford.edu
Thu Apr 24 10:59:12 PDT 2003


SF6 flow rate still fluctuates significantly when STS is running. 
This makes the etch very inconsistant.
Is it possible to seperate the power supply of MRC far away from the STS?
Thanks for your attention.




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