Problem mrc 2003-04-24 10:59:11: Report Problem for mrc

cshen at cshen at
Thu Apr 24 10:59:12 PDT 2003

SF6 flow rate still fluctuates significantly when STS is running. 
This makes the etch very inconsistant.
Is it possible to seperate the power supply of MRC far away from the STS?
Thanks for your attention.

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