From crichter at snf.stanford.edu  Fri Jan  3 04:33:15 2003
From: crichter at snf.stanford.edu (crichter at snf.stanford.edu)
Date: Jan 3, 2003 4:33:15 PM
Subject: Problem mrc 2003-01-03 16:33:13: MFC#2 giving reading of 0.6sccm when dials are at zero
Message-ID: <mailman.70.1356282581.4282.mrc-pcs@snf.stanford.edu>

I used this tool earlier this morning and told Len that the readings in MFC#2 were at 0.2sccm when the dial is at zero. I enabled it again just now and now I got 0.6 sccm



From cbaxter at snf.stanford.edu  Fri Jan  3 06:25:03 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jan 3, 2003 6:25:03 PM
Subject: Problem mrc 2003-01-03 16:33:13: MFC#2 giving reading of 0.6sccm when dials are at zero
Message-ID: <mailman.71.1356282581.4282.mrc-pcs@snf.stanford.edu>

gas's are reading zero now on display



From latta at snf.stanford.edu  Wed Jan 22 03:57:48 2003
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Jan 22, 2003 3:57:48 PM
Subject: Shutdown mrc 2003-01-22 15:57:47: PCW  line needs replacing
Message-ID: <mailman.72.1356282581.4282.mrc-pcs@snf.stanford.edu>

Line is brittle and nasty....



From booth at snf.stanford.edu  Thu Jan 23 09:24:58 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jan 23, 2003 9:24:58 AM
Subject: Shutdown mrc 2003-01-22 15:57:47: PCW  line needs replacing
Message-ID: <mailman.73.1356282581.4282.mrc-pcs@snf.stanford.edu>

Jim H. replaced cooling water line.
Len restarted DP & pumped chamber
down to base.



From chion at snf.stanford.edu  Thu Jan 30 04:25:17 2003
From: chion at snf.stanford.edu (chion at snf.stanford.edu)
Date: Jan 30, 2003 4:25:17 PM
Subject: Problem mrc 2003-01-30 16:25:16: No voltage after RF power on
Message-ID: <mailman.74.1356282581.4282.mrc-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Jan 30 05:10:36 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jan 30, 2003 5:10:36 PM
Subject: Problem mrc 2003-01-30 16:25:16: No voltage after RF power on
Message-ID: <mailman.75.1356282581.4282.mrc-pcs@snf.stanford.edu>

de-tune and then re-tune match got voltage reading back



From dchi at snf.stanford.edu  Fri Jan 31 04:10:21 2003
From: dchi at snf.stanford.edu (dchi at snf.stanford.edu)
Date: Jan 31, 2003 4:10:21 PM
Subject: Problem mrc 2003-01-31 16:10:19: mrc
Message-ID: <mailman.76.1356282581.4282.mrc-pcs@snf.stanford.edu>

no etching occured during use.
voltage reading was zero, otherwise everything appeared fine.



From cbaxter at snf.stanford.edu  Fri Jan 31 05:32:52 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jan 31, 2003 5:32:52 PM
Subject: Problem mrc 2003-01-31 16:10:19: mrc
Message-ID: <mailman.77.1356282581.4282.mrc-pcs@snf.stanford.edu>

using Ar gas and 50mt pressure(typical process recipe)
was able to strike plasma. 100watts fwd and 700 rf volt.