Problem mrc SNF 2004-12-08 13:41:22: MRC Base Pressure

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Wed Dec 8 13:41:23 PST 2004


Yesterday I etched 500A of Pt which took 9  minutes to etch.  I verified the Pt thickness on the Dektak and it was 500A.  500A of Pt should etch in 7 minutes using the Sputter Etch recipe, Ar = 10.0, Pressure = 10.0, RF = 100 W, PV = 600 V.  I have etched many wafers with 500A Pt and they etched in 7 minutes.  Also, the Base Pressure will not drop below 1.7 when the gate valve is fully open.




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