From shott at snf.stanford.edu Thu Jan 1 17:29:22 2004 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 1 Jan 2004 17:29:22 -0800 Subject: Shutdown mrc 2004-01-01 17:29:21: Water leak in MRC ... Message-ID: Thanks, John From shott at snf.stanford.edu Thu Jan 1 17:42:03 2004 From: shott at snf.stanford.edu (John Shott) Date: Thu, 01 Jan 2004 17:42:03 -0800 Subject: MRC Leak update ... Message-ID: <3FF4CC6B.7080508@snf.stanford.edu> Friends of the MRC: Just one more update ... the DP is now reasonably cool. I've left on system power and the roughing pump. I've turned off: 1. Processing cooling water to the MRC in the finger wall. 2. The chiller in the basement. 3. The diffusion pump: both the Hi-Vac switch on the front panel and by pulling the electrical connection to the heaters at the base of the DP. Thanks, John From latta at snf.stanford.edu Mon Jan 5 14:02:51 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Mon, 5 Jan 2004 14:02:51 -0800 Subject: Shutdown mrc 2003-12-19 11:29:33: Holiday Shutdown Message-ID: back from shutdown From booth at snf.stanford.edu Mon Jan 5 15:49:25 2004 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mon, 5 Jan 2004 15:49:25 -0800 Subject: Shutdown mrc 2004-01-01 17:29:21: Water leak in MRC ... Message-ID: Replaced 1/2" poly flow PCW lines for supply and return cooling of the DP. Tested water flow thru lines - it looks good. System pumps down normally. From ziebarth at snf.stanford.edu Tue Jan 13 10:05:36 2004 From: ziebarth at snf.stanford.edu (ziebarth at snf.stanford.edu) Date: Tue, 13 Jan 2004 10:05:36 -0800 Subject: Problem mrc 2004-01-13 10:05:35: Foreline Vacuum Gauge Message-ID: With foreline valve open, I believe the foreline and roughing T/C should have roughly the same reading. But roughing reads ~10 mT and foreline reads ~200 mT. Also with the gate valve open, foreline still reads ~200 mT when capacitance manometer reads ~ 0 mT. From cbaxter at snf.stanford.edu Tue Jan 13 18:02:14 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 13 Jan 2004 18:02:14 -0800 Subject: Problem mrc 2004-01-13 10:05:35: Foreline Vacuum Gauge Message-ID: foreline gat is leaking. rebuild gate. From johnpaul at snf.stanford.edu Wed Jan 14 11:53:11 2004 From: johnpaul at snf.stanford.edu (johnpaul at snf.stanford.edu) Date: Wed, 14 Jan 2004 11:53:11 -0800 Subject: Problem mrc 2004-01-14 11:53:10: Capacitance Manometer likely damaged Message-ID: At the end of my etch today, I failed to remember to isolate the manometer before venting. I'm afraid the unit must have been damaged - it is not currently showing a reading on the LED display. From mcvittie at snf.stanford.edu Wed Jan 14 15:32:48 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 14 Jan 2004 15:32:48 -0800 Subject: Problem mrc 2004-01-14 11:53:10: Capacitance Manometer likely damaged Message-ID: I have rezeroed the manometer. It was only off by 4 mT. Jim From calarrudo at snf.stanford.edu Tue Jan 27 16:40:57 2004 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 27 Jan 2004 16:40:57 -0800 Subject: Problem mrc 2004-01-27 16:40:56: mrc burning photo resist Message-ID: The mrc ion etcher is burning photo resist again it is possible the chiller has another leak. From cbaxter at snf.stanford.edu Tue Jan 27 18:24:43 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 27 Jan 2004 18:24:43 -0800 Subject: Problem mrc 2004-01-27 16:40:56: mrc burning photo resist Message-ID: found chiller set at 23c, lower it back down to 18c. no leak found on chiller From calarrudo at snf.stanford.edu Fri Jan 30 20:01:52 2004 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Fri, 30 Jan 2004 20:01:52 -0800 Subject: Problem mrc 2004-01-30 20:01:52: burnt resist Message-ID: The photo resist on my wafers are burning with a 7 min Pt etch. Ar gas =10.3, pressure =10.4, RF Forward =100 watts, Peak Volts = 600, 3612, 1.0 micron resist 50 minutes in the drytek 1 using the polymer strip receipe isn't removing the resist. The resist is burnt black. From cbaxter at snf.stanford.edu Fri Jan 30 20:07:54 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 30 Jan 2004 20:07:54 -0800 Subject: Problem mrc 2004-01-30 20:01:52: burnt resist Message-ID: