Problem mrc 2004-01-30 20:01:52: burnt resist

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Fri Jan 30 20:01:52 PST 2004


The photo resist on my wafers are burning with a 7 min Pt etch.
Ar gas =10.3, pressure =10.4, RF Forward =100 watts, Peak 
Volts = 600, 3612, 1.0 micron resist
50 minutes in the drytek 1 using the polymer strip receipe isn't removing the resist.  The resist is burnt black.




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