From calarrudo at snf.stanford.edu  Tue Jun  1 10:45:07 2004
From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu)
Date: Tue, 1 Jun 2004 10:45:07 -0700
Subject: Problem mrc 2004-06-01 10:45:06: F23 meter unstable
Message-ID: <mailman.104.1356282582.4282.mrc-pcs@snf.stanford.edu>

The F23 meter has been fluctuating.  I set it for 5.0 during the 
etch process it will then shoot up to 12.0 then drop to 2.4 before going back to its original setting of 5.0.  



From eenriquez at snf.stanford.edu  Tue Jun  1 15:05:12 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 1 Jun 2004 15:05:12 -0700
Subject: Problem mrc 2004-06-01 10:45:06: F23 meter unstable
Message-ID: <mailman.105.1356282582.4282.mrc-pcs@snf.stanford.edu>

no problem found. Ran 2x, f23 very stable.