Problem mrc 2004-06-01 10:45:06: F23 meter unstable

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Tue Jun 1 10:45:07 PDT 2004


The F23 meter has been fluctuating.  I set it for 5.0 during the 
etch process it will then shoot up to 12.0 then drop to 2.4 before going back to its original setting of 5.0.  




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