From bleen at snf.stanford.edu  Wed Sep  8 21:29:11 2004
From: bleen at snf.stanford.edu (bleen at snf.stanford.edu)
Date: Wed, 8 Sep 2004 21:29:11 -0700
Subject: Problem mrc SNF 2004-09-08 21:29:11: upper electrode flaking
Message-ID: <mailman.108.1356282582.4282.mrc-pcs@snf.stanford.edu>

the upper electrode was wrinkled slightly on the edge when i opened the chamber.  after ~1hr argon etch the flaking has become severe.
Brian



From cbaxter at snf.stanford.edu  Wed Sep  8 23:15:15 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 8 Sep 2004 23:15:15 -0700
Subject: Problem mrc SNF 2004-09-08 21:29:11: upper electrode flaking
Message-ID: <mailman.109.1356282582.4282.mrc-pcs@snf.stanford.edu>

wipe down upper electrode with water and ipa