Problem mrc SNF 2005-10-07 12:02:46: MFC 2 fluctuation

mmager at mmager at
Fri Oct 7 12:02:46 PDT 2005

the last few times I've used the MRC, MFC2 (running F23) has suddenly dropped to zero flow for a few seconds before coming back up to the setpoint. It hasn't happened while etching, only while stabilizing chamber pressure.

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