Problem mrc SNF 2005-10-07 12:02:46: MFC 2 fluctuation

mmager at snf.stanford.edu mmager at snf.stanford.edu
Fri Oct 7 12:02:46 PDT 2005


the last few times I've used the MRC, MFC2 (running F23) has suddenly dropped to zero flow for a few seconds before coming back up to the setpoint. It hasn't happened while etching, only while stabilizing chamber pressure.




More information about the mrc-pcs mailing list