Shutdown mrc SNF 2005-10-11 15:12:35: Slow pumping speed.

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Oct 11 15:12:35 PDT 2005


Pressure rises uncontrollably when ran with a 30 sccm of Ar flow @ 12 mTorr.  System runs OK when running the standard recipes.  Will check diffusion pump oil level.




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