Shutdown mrc SNF 2005-10-31 14:09:37: pressure climbing in MRC

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Mon Oct 31 14:09:46 PST 2005

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Prfessure climbing during the etch.  Turned MRC off at 2:05 pm per Elmer to let cool down to check diffusion pump oil.

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