Shutdown mrc SNF 2005-10-31 14:09:37: pressure climbing in MRC

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Mon Oct 31 14:09:46 PST 2005


Prfessure climbing during the etch.  Turned MRC off at 2:05 pm per Elmer to let cool down to check diffusion pump oil.




More information about the mrc-pcs mailing list