From mmager at snf.stanford.edu Thu Sep 1 13:23:14 2005 From: mmager at snf.stanford.edu (mmager at snf.stanford.edu) Date: Thu, 1 Sep 2005 13:23:14 -0700 Subject: Problem mrc SNF 2005-09-01 13:23:13: Possible leak in system Message-ID: The past few times I've used the MRC, it seems like there has been some kind of leak in the system. With the gate valve closed, the pressure in the chamber climbs rapidly (>1mTorr/s). And even when flowing in pure O2, the plasma color is pink, which indicates N2. From cbaxter at snf.stanford.edu Thu Sep 1 17:56:07 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 1 Sep 2005 17:56:07 -0700 Subject: Problem mrc SNF 2005-09-01 13:23:13: Possible leak in system Message-ID: changed the o-ring on the view port window. rate of rise is >10mt per min. From calarrudo at snf.stanford.edu Mon Sep 12 12:12:46 2005 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Mon, 12 Sep 2005 12:12:46 -0700 Subject: Problem mrc SNF 2005-09-12 12:12:46: pressure not correct Message-ID: When the gate valve is opened all the way, I then turn on the black toggle key for the gases, open the mfc for the Argon to 30.0 the pressure starts to rise to 40.0 when it is open all the way. At this step the pressure should be no more than 4.5, there is something really wrong.... From eenriquez at snf.stanford.edu Mon Sep 12 16:32:42 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Sep 2005 16:32:42 -0700 Subject: Comment mrc SNF 2005-09-12 16:32:42: "Pressure not correct" update Message-ID: Found the KF o-ring on the chamber side of the roughing had a leak. Pressure is now controlable at standard recipe pressure settings. From eenriquez at snf.stanford.edu Tue Sep 13 08:00:24 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Sep 2005 08:00:24 -0700 Subject: Shutdown mrc SNF 2005-09-13 08:00:24: Changing Diff pump oil Message-ID: From eenriquez at snf.stanford.edu Tue Sep 13 15:25:23 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Sep 2005 15:25:23 -0700 Subject: Shutdown mrc SNF 2005-09-13 08:00:24: Changing Diff pump oil Message-ID: Drained oil and re-filled with new oil. Chamber pressure with 30 sccm of Ar flow (gate valve full open) is about 4 mT. Pressure before the oil change was around 28 mT. From eenriquez at snf.stanford.edu Tue Sep 13 15:26:03 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Sep 2005 15:26:03 -0700 Subject: Comment mrc SNF 2005-09-12 16:32:42: "Pressure not correct" update Message-ID: Drained oil and re-filled with new oil. Chamber pressure with 30 sccm of Ar flow (gate valve full open) is about 4 mT. Pressure before the oil change was around 28 mT. From eenriquez at snf.stanford.edu Tue Sep 13 15:26:10 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Sep 2005 15:26:10 -0700 Subject: Problem mrc SNF 2005-09-12 12:12:46: pressure not correct Message-ID: Drained oil and re-filled with new oil. Chamber pressure with 30 sccm of Ar flow (gate valve full open) is about 4 mT. Pressure before the oil change was around 28 mT. From gibby at snf.stanford.edu Tue Sep 20 08:32:02 2005 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Tue, 20 Sep 2005 08:32:02 -0700 Subject: Comment mrc SNF 2005-09-20 08:32:01: #2 MFC Message-ID: Dial on #2 MFC is loose. From calarrudo at snf.stanford.edu Tue Sep 20 16:26:03 2005 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 20 Sep 2005 16:26:03 -0700 Subject: Problem mrc SNF 2005-09-20 16:26:01: Gate valve will not pumpdown below 12.0 mt Message-ID: The gate vavve will not pump below 12.0 mt. I have have the machine on since just before the power qlich. I cannot use the MRC in its current state. It should pump down to about 1.6 mt when the gate valve is open all the way. From cbaxter at snf.stanford.edu Tue Sep 20 18:37:28 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 20 Sep 2005 18:37:28 -0700 Subject: Problem mrc SNF 2005-09-20 16:26:01: Gate valve will not pumpdown below 12.0 mt Message-ID: dp is ready and chamber pump blow 10mt