Problem mrc SNF 2005-09-01 13:23:13: Possible leak in system

mmager at snf.stanford.edu mmager at snf.stanford.edu
Thu Sep 1 13:23:14 PDT 2005


The past few times I've used the MRC, it seems like there has been some kind of leak in the system. With the gate valve closed, the pressure in the chamber climbs rapidly (>1mTorr/s). And even when flowing in pure O2, the plasma color is pink, which indicates N2.




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