From hansj at snf.stanford.edu Mon Apr 3 16:52:41 2006 From: hansj at snf.stanford.edu (hansj at snf.stanford.edu) Date: Mon, 3 Apr 2006 16:52:41 -0700 Subject: Problem mrc SNF 2006-04-03 16:52:40: Cannot get stable pressure while etching Message-ID: I'm using SF6/Ar mixture and cannot get control of pressure From eenriquez at snf.stanford.edu Mon Apr 3 20:47:09 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Apr 2006 20:47:09 -0700 Subject: Problem mrc SNF 2006-04-03 16:52:40: Cannot get stable pressure while etching Message-ID: Since the last user did not state the gas flows and chamber pressure, I ran a recipe using the last Ar (4 sccm) and SF6 (18 sccm) set points. The lowest pressure that I was able to control was ~6 mT with the RF on at 100 W. The recipe ran without any problems. From calarrudo at snf.stanford.edu Tue Apr 4 12:35:45 2006 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 4 Apr 2006 12:35:45 -0700 Subject: Problem mrc SNF 2006-04-04 12:35:44: Pressure not stable when RF is on Message-ID: Pressure not stable when RF is on. I need to put the MRC in shutdown mode. From calarrudo at snf.stanford.edu Tue Apr 4 12:36:17 2006 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 4 Apr 2006 12:36:17 -0700 Subject: Shutdown mrc SNF 2006-04-04 12:36:16: Pressure not stable when RF is on Message-ID: From cbaxter at snf.stanford.edu Tue Apr 4 15:56:22 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 4 Apr 2006 15:56:22 -0700 Subject: Shutdown mrc SNF 2006-04-04 12:36:16: Pressure not stable when RF is on Message-ID: cleaned tc and top off dp pump with fomblin oil. From cbaxter at snf.stanford.edu Tue Apr 4 15:57:19 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 4 Apr 2006 15:57:19 -0700 Subject: Problem mrc SNF 2006-04-04 12:35:44: Pressure not stable when RF is on Message-ID: run ar(15sccm) and set pressure @10mt w/o problem. From calarrudo at snf.stanford.edu Wed Apr 5 10:38:08 2006 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Wed, 5 Apr 2006 10:38:08 -0700 Subject: Problem mrc SNF 2006-04-05 10:38:07: Argon pressure rises when RF on Message-ID: The Argon pressure goes up when RF on. From cbaxter at snf.stanford.edu Wed Apr 5 11:15:47 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 Apr 2006 11:15:47 -0700 Subject: Shutdown mrc SNF 2006-04-05 11:15:47: pressure rising, won't control @12mt setpoint. Message-ID: From cbaxter at snf.stanford.edu Tue Apr 11 13:59:11 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 11 Apr 2006 13:59:11 -0700 Subject: Shutdown mrc SNF 2006-04-05 11:15:47: pressure rising, won't control @12mt setpoint. Message-ID: installed new insulator quartz ring. From cbaxter at snf.stanford.edu Tue Apr 11 14:00:01 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 11 Apr 2006 14:00:01 -0700 Subject: Problem mrc SNF 2006-04-05 10:38:07: Argon pressure rises when RF on Message-ID: installed new quartz insulator ring and test with 30sccm argon @12mt pressure w/o problem. From ericp at snf.stanford.edu Tue Apr 11 18:43:12 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Tue, 11 Apr 2006 18:43:12 -0700 Subject: Shutdown mrc SNF 2006-04-11 18:43:11: sprung a water leak Message-ID: The water cooling line blew. The burst is at the back of the machine (knee level) where the water enters the cabinet. DP is off. From shott at snf.stanford.edu Tue Apr 11 18:43:32 2006 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 11 Apr 2006 18:43:32 -0700 Subject: Shutdown mrc SNF 2006-04-11 18:43:31: Water leak .... Message-ID: Cooling water shut due to significant leakage. I got the call from work control ... but by the time I got in ericp and some of the other evening workers had it pretty much under control. I don't even know precisely which water line it is ... but it was apparently shutdown in the fingerwall.Thanks, John From cbaxter at snf.stanford.edu Wed Apr 12 16:34:56 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 12 Apr 2006 16:34:56 -0700 Subject: Shutdown mrc SNF 2006-04-11 18:43:31: Water leak .... Message-ID: From cbaxter at snf.stanford.edu Wed Apr 12 16:38:47 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 12 Apr 2006 16:38:47 -0700 Subject: Shutdown mrc SNF 2006-04-11 18:43:11: sprung a water leak Message-ID: Changed polyflo tubing to a high temp tubing for DP cooling and also, changed clogged up brass fitting on system output water port. heat up DP and monitor, no water leak seen. From jameson at snf.stanford.edu Mon Apr 17 14:47:00 2006 From: jameson at snf.stanford.edu (jameson at snf.stanford.edu) Date: Mon, 17 Apr 2006 14:47:00 -0700 Subject: Problem mrc SNF 2006-04-17 14:46:59: problem: won't go below 70mT Message-ID: I was running 2.0sccm O2 and 15.0sccm of CHF3, but I couldn't get the chamber to go below ~70mT with the gate valve all the way open. Jim McVittie tinkered for a few seconds, then said there's a problem. From cbaxter at snf.stanford.edu Mon Apr 17 16:51:50 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 17 Apr 2006 16:51:50 -0700 Subject: Problem mrc SNF 2006-04-17 14:46:59: problem: won't go below 70mT Message-ID: repaired one of the 120ac phase wire that was burned that powered the dp heater.