Problem mrc SNF 2006-04-03 16:52:40: Cannot get stable pressure while etching

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Apr 3 20:47:09 PDT 2006


Since the last user did not state the gas flows and chamber pressure, I ran a recipe using the last Ar (4 sccm) and SF6 (18 sccm) set points.  The lowest pressure that I was able to control was ~6 mT with the RF on at 100 W. The recipe ran without any problems.




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