Problem mrc SNF 2006-08-03 13:46:05: zero drifting for mtorr pressure
calarrudo at snf.stanford.edu
calarrudo at snf.stanford.edu
Thu Aug 3 13:46:06 PDT 2006
Gate valve completely open reads less than zero in pressure mtorr. If I set my pressure to 10 mtorr based on the less than zero my wafers are over etching. If I set my pressure higher to
12.0 mtorr my wafers now etch correctly. Please check the
manometer zero to see if it has drifted and make corrections
please.
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