Problem mrc SNF 2006-08-15 16:06:22: matching network problem

jameson at snf.stanford.edu jameson at snf.stanford.edu
Tue Aug 15 16:06:26 PDT 2006


Used MRC today at 50mT and 50W forward power.  Tuend network and got 3W reflected power, then did two 10s etches.  During 3rd etch, reflected power was much higher.  Tuned network again and had to rotate load knob almost 180 degrees from previous position in order to get low reflected power (now 1W).  Did another 10s etch, and got ~30% higher etch rate than before retuning.  Also noticed sudden jumps in gas flow rates (~30%), which settled back to their set points over a period of about 10s.




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