Shutdown mrc SNF 2006-12-05 15:30:59: Pressure climbing

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Tue Dec 5 15:31:00 PST 2006


I am unable to stablize pressure of 12.0 mtorr.  The pressure continues to climb.  Please check oil to see if it is low.  my etch conditions are Ar = 30.0 sccm, APressure = 12.0 mtorr, 
RF = 100 W, PV = 600 V.  




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