Shutdown mrc SNF 2006-12-06 12:06:41: Pressure Problem

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Wed Dec 6 12:06:41 PST 2006


I'm having the same problem that I had yesterday with the 
pressure.  Etch that I need has Ar (30.0 sccm), Pressure (12.0), RF (100 W), PV (600 V).  The pressure isn't stable.




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