Shutdown mrc SNF 2006-12-06 12:06:41: Pressure Problem

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Wed Dec 6 12:06:41 PST 2006

Previous message: Shutdown mrc SNF 2006-12-05 15:30:59: Pressure climbing
Next message: Shutdown mrc SNF 2006-12-06 12:06:41: Pressure Problem
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

I'm having the same problem that I had yesterday with the 
pressure.  Etch that I need has Ar (30.0 sccm), Pressure (12.0), RF (100 W), PV (600 V).  The pressure isn't stable.

Previous message: Shutdown mrc SNF 2006-12-05 15:30:59: Pressure climbing
Next message: Shutdown mrc SNF 2006-12-06 12:06:41: Pressure Problem
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the mrc-pcs mailing list