Comment mrc SNF 2006-12-11 23:56:47: MRC pump speed seems to be slowing

king at king at
Mon Dec 11 23:56:48 PST 2006

During processing the throttle was wide open and it could only pump to 40mT (what I happened to need).  Was flowing 2sccm O2 and 28sccm CHF3.   I don't know if this will be OK for Mary C's work Tuesday morning.  FYI, thanks.

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