From calarrudo at snf.stanford.edu  Mon Jul 24 14:49:10 2006
From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu)
Date: Mon, 24 Jul 2006 14:49:10 -0700
Subject: Shutdown mrc SNF 2006-07-24 14:49:09: Pressure not stable, climbing
Message-ID: <mailman.182.1356282582.4282.mrc-pcs@snf.stanford.edu>

TiN receipe Ar (15.0), SF6 (15.0) Press (10.0), RF (100), 
PV (600) pressure climbing tpo 20.0.  This is to unstable for 
me to etch my wafers.  The oil is most likely low.  I have used   this recipe numerous times.



From eenriquez at snf.stanford.edu  Tue Jul 25 12:26:32 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 25 Jul 2006 12:26:32 -0700
Subject: Shutdown mrc SNF 2006-07-24 14:49:09: Pressure not stable, climbing
Message-ID: <mailman.183.1356282582.4282.mrc-pcs@snf.stanford.edu>

Added oil to diffusion pump.  Now able to control pressure at users pressure and flow rates