Shutdown mrc SNF 2006-07-24 14:49:09: Pressure not stable, climbing

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Mon Jul 24 14:49:10 PDT 2006


TiN receipe Ar (15.0), SF6 (15.0) Press (10.0), RF (100), 
PV (600) pressure climbing tpo 20.0.  This is to unstable for 
me to etch my wafers.  The oil is most likely low.  I have used   this recipe numerous times.




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