From ratiug at snf.stanford.edu Sun May 7 13:23:19 2006 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Sun, 7 May 2006 13:23:19 -0700 Subject: Problem mrc SNF 2006-05-07 13:23:18: fail to pump down Message-ID: presure didnt go down below 4mT and gate lose control of presure. From cbaxter at snf.stanford.edu Mon May 8 10:18:06 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 8 May 2006 10:18:06 -0700 Subject: Problem mrc SNF 2006-05-07 13:23:18: fail to pump down Message-ID: dp pump shut down, reset dp pump.. From calarrudo at snf.stanford.edu Tue May 16 11:36:26 2006 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 16 May 2006 11:36:26 -0700 Subject: Problem mrc SNF 2006-05-16 11:36:26: Pressure 15.0 with Gate valve fully opened Message-ID: From calarrudo at snf.stanford.edu Tue May 16 11:37:23 2006 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 16 May 2006 11:37:23 -0700 Subject: Shutdown mrc SNF 2006-05-16 11:37:22: Pressure 15.0 with gate valve fully open Message-ID: From cbaxter at snf.stanford.edu Tue May 16 12:36:30 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 16 May 2006 12:36:30 -0700 Subject: Shutdown mrc SNF 2006-05-16 11:37:22: Pressure 15.0 with gate valve fully open Message-ID: reset dp pump and turn on heater. From cbaxter at snf.stanford.edu Tue May 16 12:36:35 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 16 May 2006 12:36:35 -0700 Subject: Problem mrc SNF 2006-05-16 11:36:26: Pressure 15.0 with Gate valve fully opened Message-ID: From lizhb at snf.stanford.edu Wed May 17 18:08:28 2006 From: lizhb at snf.stanford.edu (lizhb at snf.stanford.edu) Date: Wed, 17 May 2006 18:08:28 -0700 Subject: Problem mrc SNF 2006-05-17 18:08:28: MRC can't achieve low pressure Message-ID: When attempting to pump down, I cannot get the pressure below approx. 12 mTorr by opening the gate valve. (I opened the gate valve completely.) After waiting for the chamber to reach base pressure for more than 5-10 mins, the pressure is still at 9-10 mTorr. I attempted to pump down several times. There does not appear to be a leak. From cbaxter at snf.stanford.edu Thu May 18 11:23:26 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 18 May 2006 11:23:26 -0700 Subject: Problem mrc SNF 2006-05-17 18:08:28: MRC can't achieve low pressure Message-ID: elmer add dp oil.. checked dp and chamber pumped down to base @ lees than 10 mt. From calarrudo at snf.stanford.edu Thu May 18 14:38:21 2006 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Thu, 18 May 2006 14:38:21 -0700 Subject: Problem mrc SNF 2006-05-18 14:38:21: Pressure not stable Message-ID: I am using the same recipe that I always use Ar = 15.0 sccm, presurre = 10.0, RF = 100, PV = 600. Intial pumpdown to base pressure when gate valve fully open is -.0006 mt, when Ar is turned on the pressure is rising to 8.0 then drops back to (1.2). I normally bring the pressure up to 20.0 to ignite the plasma when RF the pressure drops to 10.0 mt when plasma ignites. The pressure is dropping to 3.0 then I have to bring it back up to 10.0 while my wafer is etching. I need to do some 15 sec and 30 sec etches its taking that long to stablize to 10.0 so this won't work for me. In the past the MRC has been very stable with its pressure and I have been able to do 30 sec etches but not now. Because thisis the primary tool that I use all the time I know when it isn't work correctly. From cbaxter at snf.stanford.edu Fri May 19 15:52:42 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 19 May 2006 15:52:42 -0700 Subject: Problem mrc SNF 2006-05-18 14:38:21: Pressure not stable Message-ID: zeroed the baratron... From calarrudo at snf.stanford.edu Tue May 23 10:48:11 2006 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 23 May 2006 10:48:11 -0700 Subject: Shutdown mrc SNF 2006-05-23 10:48:10: Pressure with gate valve oprn 16.0 Message-ID: Pressure with gate valve fully open after two minutes 16.0. From cbaxter at snf.stanford.edu Tue May 23 14:16:15 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 23 May 2006 14:16:15 -0700 Subject: Shutdown mrc SNF 2006-05-23 10:48:10: Pressure with gate valve oprn 16.0 Message-ID: drained and refilled with fresh dp oil. From gibby at snf.stanford.edu Sat May 27 11:15:10 2006 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Sat, 27 May 2006 11:15:10 -0700 Subject: Shutdown mrc SNF 2006-05-27 11:15:09: Mechanical Pump Light Would not turn on Message-ID: Did not do any etching due to system not in standby conditions. From cbaxter at snf.stanford.edu Tue May 30 10:04:48 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 30 May 2006 10:04:48 -0700 Subject: Shutdown mrc SNF 2006-05-27 11:15:09: Mechanical Pump Light Would not turn on Message-ID: system is fine, the light buld for the mechanicql pump indicator was out.