Problem mrc SNF 2006-05-17 18:08:28: MRC can't achieve low pressure

lizhb at snf.stanford.edu lizhb at snf.stanford.edu
Wed May 17 18:08:28 PDT 2006


When attempting to pump down, I cannot get the pressure below approx. 12 mTorr by opening the gate valve.  (I opened the gate valve completely.)  After waiting for the chamber to reach base pressure for more than 5-10 mins, the pressure is still at 9-10 mTorr.  I attempted to pump down several times.  There does not appear to be a leak.




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