Shutdown mrc SNF 2006-10-03 09:39:38: no rf peak voltage

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Oct 3 13:57:42 PDT 2006


rf cooling water resistivity was @15k. drained cooling
water and filled it up with fresh di water. resistivity is now
@2.0 meg. run 3 sccm of o2 and 15 sccm of sf6 and
able to strike plasma w/out problem.




More information about the mrc-pcs mailing list