Shutdown mrc SNF 2007-08-04 13:19:18: Roughing valve step won't pump

mihirt at mihirt at
Sat Aug 4 13:19:19 PDT 2007

When I open the Roughing Valve, the Roughing T/C remains at atmosphere and will not pump at all. The Foreline T/C is also at atmosphere. Could not etch any samples because vacuum was never reached. 

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