Shutdown mrc SNF 2007-08-04 13:19:18: Roughing valve step won't pump

mihirt at snf.stanford.edu mihirt at snf.stanford.edu
Sat Aug 4 13:19:19 PDT 2007


When I open the Roughing Valve, the Roughing T/C remains at atmosphere and will not pump at all. The Foreline T/C is also at atmosphere. Could not etch any samples because vacuum was never reached. 




More information about the mrc-pcs mailing list