From jnee at snf.stanford.edu Thu Jul 12 16:47:24 2007 From: jnee at snf.stanford.edu (jnee at snf.stanford.edu) Date: Thu, 12 Jul 2007 16:47:24 -0700 Subject: Shutdown mrc SNF 2007-07-12 16:47:23: No peak V Message-ID: I was able to successfully etch nitride on 3 wafers and then do oxygen plasma resist strip on 1 wafer. On the 2nd wafer for oxygen plasma resist strip, I noticed that there was no V peak (no movement of the gauge whatsoever) when I was applying power and tuning the input/load tunes. The needle on the Vpeak gauge doesn't move one bit - I left the wafer in thinking perhaps the gauge is bad, but after the same amount of time as the first wafer, the resist was all there and the wafer was cold, meaning there was no plasma. From cbaxter at snf.stanford.edu Fri Jul 13 08:43:56 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 13 Jul 2007 08:43:56 -0700 Subject: Shutdown mrc SNF 2007-07-12 16:47:23: No peak V Message-ID: Run sf6 plasma and was able to get rf peak voltage to 1x1000 with 150watts forward power with 0 reflective.