Problem mrc SNF 2007-05-08 11:37:10: CHF3 flow unstable

jameson at snf.stanford.edu jameson at snf.stanford.edu
Tue May 8 11:37:10 PDT 2007


Started my etch with 15sccm CHF3.  Dropped to 10.8 after
15 minutes.  Could not get it back up to 15.  Is the CHF3 running out?  I'm releasing my MRC time today, since I can't use it now.




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