Problem mrc SNF 2007-11-26 22:14:24: Leak?

closega at snf.stanford.edu closega at snf.stanford.edu
Mon Nov 26 22:14:25 PST 2007


When the chamber is pumped down for 5min all the way to zero and the gate valve is subsequently closed, the pressure goes back up pretty quickly ~ 1mTorr/sec. Is this an indication of a leak?
The etch rate are also completely off the mark on my usual recipe: O2 + CHF3.
-Gael




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