From lwchang at snf.stanford.edu  Mon Oct  8 11:07:50 2007
From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu)
Date: Mon, 8 Oct 2007 11:07:50 -0700
Subject: Problem mrc SNF 2007-10-08 11:07:50: plasma doesn't strike
Message-ID: <mailman.261.1356282584.4282.mrc-pcs@snf.stanford.edu>

I used to have the plasma striked at RF Vpeak around 1kV with CHF3 @ 20sccm 10mT and 200W. Today when I turned on the RF power the Vpeak shoot up and was not adjustable by tune/load maintaining a low reflected power at the same time.



From mtang at snf.stanford.edu  Tue Oct  9 11:36:53 2007
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Tue, 9 Oct 2007 11:36:53 -0700
Subject: Problem mrc SNF 2007-10-09 11:36:53: No SF6
Message-ID: <mailman.262.1356282584.4282.mrc-pcs@snf.stanford.edu>

Do not use SF6 as it is unavailable.  Elmer is troubleshooting.



From eenriquez at snf.stanford.edu  Wed Oct 10 11:35:27 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 10 Oct 2007 11:35:27 -0700
Subject: Problem mrc SNF 2007-10-08 11:07:50: plasma doesn't strike
Message-ID: <mailman.263.1356282584.4282.mrc-pcs@snf.stanford.edu>

Tuned RF matching network.



From eenriquez at snf.stanford.edu  Wed Oct 10 11:39:18 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 10 Oct 2007 11:39:18 -0700
Subject: Problem mrc SNF 2007-10-09 11:36:53: No SF6
Message-ID: <mailman.264.1356282584.4282.mrc-pcs@snf.stanford.edu>

Repaired SF6 leak in the STSetcher gas cabinet  (STS and MRC share the SF6 line).  STSetcher's SF6 gas reservoir had a loose KF50 flange.