Problem mrc SNF 2007-10-08 11:07:50: plasma doesn't strike

lwchang at snf.stanford.edu lwchang at snf.stanford.edu
Mon Oct 8 11:07:50 PDT 2007


I used to have the plasma striked at RF Vpeak around 1kV with CHF3 @ 20sccm 10mT and 200W. Today when I turned on the RF power the Vpeak shoot up and was not adjustable by tune/load maintaining a low reflected power at the same time.




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