Problem mrc SNF 2008-04-20 16:30:11: MRC no RF voltage

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Apr 21 13:52:35 PDT 2008


Cleaned bias circuit's spring connector to the electrode.  Zeroed the bias meter.  Ran test with no problem.  With the Ar flow at 15 sccm, 12 mT pressure and a 200 Watt rf power the bias was around 1 KV.




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