From mdickey at snf.stanford.edu  Fri Aug  1 08:28:48 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 1 Aug 2008 08:28:48 -0700
Subject: Shutdown mrc SNF 2008-08-01 08:28:48: Pump oil
Message-ID: <mailman.329.1356282584.4282.mrc-pcs@snf.stanford.edu>

Down for oil to be added to pump



From mdickey at snf.stanford.edu  Fri Aug  1 13:37:50 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 1 Aug 2008 13:37:50 -0700
Subject: Shutdown mrc SNF 2008-08-01 08:28:48: Pump oil
Message-ID: <mailman.330.1356282584.4282.mrc-pcs@snf.stanford.edu>

Topped off oil to the pump. Ran argon plasma. Pressure
based at  .6 m.t.



From mdickey at snf.stanford.edu  Fri Aug  1 13:37:58 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 1 Aug 2008 13:37:58 -0700
Subject: Problem mrc SNF 2008-07-31 23:22:25: MRC needs oil
Message-ID: <mailman.331.1356282584.4282.mrc-pcs@snf.stanford.edu>

Oil added



From mdickey at snf.stanford.edu  Fri Aug  1 13:38:19 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 1 Aug 2008 13:38:19 -0700
Subject: Comment mrc SNF 2008-07-31 11:47:22: base pressure did not reach zero
Message-ID: <mailman.332.1356282584.4282.mrc-pcs@snf.stanford.edu>

Now reaches .6 m.t.



From cbaxter at snf.stanford.edu  Sat Aug  9 09:53:46 2008
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sat, 9 Aug 2008 09:53:46 -0700
Subject: Problem mrc SNF 2008-07-25 15:09:20: can't tune
Message-ID: <mailman.333.1356282584.4282.mrc-pcs@snf.stanford.edu>

I run o2 plasma and no problem tunning rf manually.



From krivoire at snf.stanford.edu  Mon Aug 18 17:31:56 2008
From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu)
Date: Mon, 18 Aug 2008 17:31:56 -0700
Subject: Problem mrc SNF 2008-08-18 17:31:56: pressure rises when closing gate valve
Message-ID: <mailman.334.1356282584.4282.mrc-pcs@snf.stanford.edu>

When closing the gate valve (with all gases turned off), the chamber pressure rises quite a bit (up to 80mT)



From calarrudo at snf.stanford.edu  Mon Aug 18 18:00:56 2008
From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu)
Date: Mon, 18 Aug 2008 18:00:56 -0700
Subject: Shutdown mrc SNF 2008-08-18 18:00:56: Base Pressure at 4.5 mtorr needs oil
Message-ID: <mailman.335.1356282584.4282.mrc-pcs@snf.stanford.edu>

The base pressure is to high at 4.5 mtorr with gate valve fully
 open cannot run at this pressure.  I shutdown the MRC.



From eenriquez at snf.stanford.edu  Tue Aug 19 10:11:49 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 19 Aug 2008 10:11:49 -0700
Subject: Shutdown mrc SNF 2008-08-18 18:00:56: Base Pressure at 4.5 mtorr needs oil
Message-ID: <mailman.336.1356282584.4282.mrc-pcs@snf.stanford.edu>

Ran an Ar plasma for 1/2 hour.  The chamber pumped down to 0.3 mT in about 1minute after opening the gate valve.



From eenriquez at snf.stanford.edu  Tue Aug 19 10:18:25 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 19 Aug 2008 10:18:25 -0700
Subject: Problem mrc SNF 2008-08-18 17:31:56: pressure rises when closing gate valve
Message-ID: <mailman.337.1356282585.4282.mrc-pcs@snf.stanford.edu>

Leak rate is 2 mT/ min.



From lwchang at snf.stanford.edu  Wed Aug 27 12:38:16 2008
From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu)
Date: Wed, 27 Aug 2008 12:38:16 -0700
Subject: Problem mrc SNF 2008-08-27 12:38:15: not tuning
Message-ID: <mailman.338.1356282585.4282.mrc-pcs@snf.stanford.edu>

ran 2sccm O2 20sccm CHF3 at 15mT 100W. plasma struck at first and after ~10min the refelect power went up to the limit. can't tune the RF afterwards.



From eenriquez at snf.stanford.edu  Wed Aug 27 15:52:10 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 27 Aug 2008 15:52:10 -0700
Subject: Problem mrc SNF 2008-08-27 12:38:15: not tuning
Message-ID: <mailman.339.1356282585.4282.mrc-pcs@snf.stanford.edu>

Helped user tune the RF in her process.