Shutdown mrc SNF 2008-08-18 18:00:56: Base Pressure at 4.5 mtorr needs oil

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Aug 19 10:11:49 PDT 2008


Ran an Ar plasma for 1/2 hour.  The chamber pumped down to 0.3 mT in about 1minute after opening the gate valve.




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