Problem mrc SNF 2008-08-27 12:38:15: not tuning

lwchang at snf.stanford.edu lwchang at snf.stanford.edu
Wed Aug 27 12:38:16 PDT 2008


ran 2sccm O2 20sccm CHF3 at 15mT 100W. plasma struck at first and after ~10min the refelect power went up to the limit. can't tune the RF afterwards.




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