From lyjiao at snf.stanford.edu Thu Dec 4 14:33:53 2008 From: lyjiao at snf.stanford.edu (lyjiao at snf.stanford.edu) Date: Thu, 4 Dec 2008 14:33:53 -0800 Subject: Comment mrc SNF 2008-12-04 14:33:52: Displays of pessure and flow failed Message-ID: The MKS display of pressure and flow turned black after venting the chamber. From lyjiao at snf.stanford.edu Thu Dec 4 14:35:32 2008 From: lyjiao at snf.stanford.edu (lyjiao at snf.stanford.edu) Date: Thu, 4 Dec 2008 14:35:32 -0800 Subject: Problem mrc SNF 2008-12-04 14:35:31: Display of pressure and flow failed Message-ID: The MKS display of pressure and flow turned black after venting the chamber. From cbaxter at snf.stanford.edu Sat Dec 6 09:32:41 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 6 Dec 2008 09:32:41 -0800 Subject: Problem mrc SNF 2008-12-04 14:35:31: Display of pressure and flow failed Message-ID: I cycled pump and vent chamber and display did not blanck out. From zhangy at snf.stanford.edu Sun Dec 7 18:07:41 2008 From: zhangy at snf.stanford.edu (zhangy at snf.stanford.edu) Date: Sun, 7 Dec 2008 18:07:41 -0800 Subject: Problem mrc SNF 2008-12-07 18:07:40: Pressure and flow rate display black after venting Message-ID: From ckenney at snf.stanford.edu Mon Dec 8 11:31:25 2008 From: ckenney at snf.stanford.edu (ckenney at snf.stanford.edu) Date: Mon, 8 Dec 2008 11:31:25 -0800 Subject: Problem mrc SNF 2008-12-08 11:31:25: lights off aqnd gas inlet valve Message-ID: 1. The gas inlet valve toggle falls down periodically 2. The lights for the gas flows and pressure went off. When the power strip was checked, they went back on. 3. The flow for SF6/CFHF3 showed a red deviation light periodically, messing with the displayed flow number. Even with this gas turned off, there was still sudden jumps in gas pressure displayed. From shott at snf.stanford.edu Wed Dec 10 09:41:03 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 10 Dec 2008 09:41:03 -0800 Subject: Comment mrc SNF 2008-10-27 04:13:17: the previous user did not switch the rough to foreline Message-ID: Clearing comment from long ago. From shott at snf.stanford.edu Wed Dec 10 09:44:07 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 10 Dec 2008 09:44:07 -0800 Subject: Problem mrc SNF 2008-12-08 11:31:25: lights off aqnd gas inlet valve Message-ID: This will certainly clear Chris's observation of power strip problems and I think that there is a likelihood that it will address the other issues because these things seem to have all been plugged into the same power strip. We will monitor to see if problems re-occur .... I made pretty good progress on improving the MRC electrical distribution of all of the "accessories". I mounted a new power strip high enough in the chamber so that it is now above the diffusion pump heater. I've moved all of the plugs into that new strip .... because of overheating, it was very difficult to get several of the plugs out of the old power strip, but they look OK. I threw away the old power strip so that it doesn't get re-used for any purpose. I should change the plug on the black cord that powers the DC supply that, I think, provides voltage for the roughing valve and foreline valve. I didn't to that this morning because I need to allow 20 minutes to change the plug .... and to do that, I will need to cool down the DP. However, someone had the tool reserved this morning so I didn't have time. I've reserved time tomorrow so that I can cool down the DP, change the plug, and then re-heat the DP. I did notice one other thing: there are 3 connectors that go into the power distribution area (behind the blank panel that is below where all the water connections go in labeled, I think 3D65, 3D6, and 3D7 .... the are the 3 rightmost connectors on that panel. They seem to control relays. Any slight wiggling of one or more of these lines causes the relays to open and close .... those connectors shouldn't be that sensitive. I don't know whether the connectors are improperly attached, impropely soldered, corroded, or what, but we should investigate this when we have the chance. Thanks, John From shott at snf.stanford.edu Wed Dec 10 09:44:31 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 10 Dec 2008 09:44:31 -0800 Subject: Problem mrc SNF 2008-12-07 18:07:40: Pressure and flow rate display black after venting Message-ID: I made pretty good progress on improving the MRC electrical distribution of all of the "accessories". I mounted a new power strip high enough in the chamber so that it is now above the diffusion pump heater. I've moved all of the plugs into that new strip .... because of overheating, it was very difficult to get several of the plugs out of the old power strip, but they look OK. I threw away the old power strip so that it doesn't get re-used for any purpose. I should change the plug on the black cord that powers the DC supply that, I think, provides voltage for the roughing valve and foreline valve. I didn't to that this morning because I need to allow 20 minutes to change the plug .... and to do that, I will need to cool down the DP. However, someone had the tool reserved this morning so I didn't have time. I've reserved time tomorrow so that I can cool down the DP, change the plug, and then re-heat the DP. I did notice one other thing: there are 3 connectors that go into the power distribution area (behind the blank panel that is below where all the water connections go in labeled, I think 3D65, 3D6, and 3D7 .... the are the 3 rightmost connectors on that panel. They seem to control relays. Any slight wiggling of one or more of these lines causes the relays to open and close .... those connectors shouldn't be that sensitive. I don't know whether the connectors are improperly attached, impropely soldered, corroded, or what, but we should investigate this when we have the chance. Thanks, John From shott at snf.stanford.edu Wed Dec 10 09:44:41 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 10 Dec 2008 09:44:41 -0800 Subject: Comment mrc SNF 2008-12-04 14:33:52: Displays of pessure and flow failed Message-ID: I made pretty good progress on improving the MRC electrical distribution of all of the "accessories". I mounted a new power strip high enough in the chamber so that it is now above the diffusion pump heater. I've moved all of the plugs into that new strip .... because of overheating, it was very difficult to get several of the plugs out of the old power strip, but they look OK. I threw away the old power strip so that it doesn't get re-used for any purpose. I should change the plug on the black cord that powers the DC supply that, I think, provides voltage for the roughing valve and foreline valve. I didn't to that this morning because I need to allow 20 minutes to change the plug .... and to do that, I will need to cool down the DP. However, someone had the tool reserved this morning so I didn't have time. I've reserved time tomorrow so that I can cool down the DP, change the plug, and then re-heat the DP. I did notice one other thing: there are 3 connectors that go into the power distribution area (behind the blank panel that is below where all the water connections go in labeled, I think 3D65, 3D6, and 3D7 .... the are the 3 rightmost connectors on that panel. They seem to control relays. Any slight wiggling of one or more of these lines causes the relays to open and close .... those connectors shouldn't be that sensitive. I don't know whether the connectors are improperly attached, impropely soldered, corroded, or what, but we should investigate this when we have the chance. Thanks, John From shott at snf.stanford.edu Thu Dec 11 06:41:12 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 11 Dec 2008 06:41:12 -0800 Subject: Shutdown mrc SNF 2008-12-11 06:41:10: Shutting down DP for electrical cord replacement ... Message-ID: From shott at snf.stanford.edu Thu Dec 11 09:22:42 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 11 Dec 2008 09:22:42 -0800 Subject: Shutdown mrc SNF 2008-12-11 06:41:10: Shutting down DP for electrical cord replacement ... Message-ID: Replaced power cord to DC supply and moved all cords and power strips away from the diffusion pump heater. John From latta at snf.stanford.edu Thu Dec 11 12:02:15 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 11 Dec 2008 12:02:15 -0800 Subject: Problem mrc SNF 2008-12-11 12:02:15: gas inlet valve flips off during etch. Message-ID: This happened repeatedly. Any chance of replacing it? It's always been such a cheesy little item... From calarrudo at snf.stanford.edu Thu Dec 11 20:49:33 2008 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Thu, 11 Dec 2008 20:49:33 -0800 Subject: Problem mrc SNF 2008-12-11 20:49:32: MRC Message-ID: Chamber is getting hot...Etch rate has changed from yesterday on the same test wafer 500A Pt/TiO2. Black switch that turns on gases, keeps turning off during the process. From shott at snf.stanford.edu Sat Dec 13 06:37:27 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 13 Dec 2008 06:37:27 -0800 Subject: Comment mrc SNF 2008-12-13 06:37:26: Bias levels created with lower RF power ... Message-ID: MRC community: Last week, Jim McVittie made some improvements to the way that the RF energy is coupled into the system. The end result is that energy is being more directly coupled into the system and that it will take less RF power to achieve the same bias level. For example, Jim and Mary Calarrudo found that her recipe only required 82 watts of RF power, instead of 100 watts, to generate a bias voltage of 600 V. Jim recommends that you each monitor your process carefully in light of these changes, but suggests that you will likely want to reduce RF power slightly in order to achieve the same bias voltage. In order to make it easier to monitor and reproduce these bias voltages we will add a digital readout of the bias voltage in the coming days. Happy processing, John