Problem mrc SNF 2008-12-11 20:49:32: MRC

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Thu Dec 11 20:49:33 PST 2008


Chamber is getting hot...Etch rate has changed from 
yesterday on the same test wafer 500A Pt/TiO2.  Black switch
 that turns on gases, keeps turning off during the process.




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