Comment mrc SNF 2008-12-13 06:37:26: Bias levels created with lower RF power ...

shott at shott at
Sat Dec 13 06:37:27 PST 2008

MRC community:
Last week, Jim McVittie made some improvements to the way that the RF energy is coupled into the system.  The end result is that energy is being more directly coupled into the system and that it will take less RF power to achieve the same bias level.  For example, Jim and Mary Calarrudo found that her recipe only required 82 watts of RF power, instead of 100 watts, to generate a bias voltage of 600 V.
Jim recommends that you each monitor your process carefully in light of these changes, but suggests that you will likely want to reduce RF power slightly in order to achieve the same bias voltage.  In order to make it easier to monitor and reproduce these bias voltages we will add a digital readout of the bias voltage in the coming days.
Happy processing,

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