Problem mrc SNF 2008-02-07 11:05:51: Problem etching wafer

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Thu Feb 7 11:05:52 PST 2008


This is the second time that I have tried etching a wafer and 
either it didn't etch  at all or it only partially etched a wafer.  I 
etched 2 wafers ran through STS dep together same thicknesses.  Calaculated the etch time eith  na test wafer etched both wafers for the same times 1 etched 1 didn't etch all the way.




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