Shutdown mrc SNF 2008-01-08 16:52:50: Fried Resist in MRC

[calarrudo at snf.stanford.edu]

1.0u, 3612 Resist fried black at ET = 6:30, Ar = 15.0, Pressure= 12.5, RF= 100 W, Peak Volts= 700 V.  This is the same          recipe that I always use to etch 500A Pt.  Please check the    
cooling water and the pump in the basement.