Shutdown mrc SNF 2008-01-08 16:52:50: Fried Resist in MRC

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Tue Jan 8 16:52:51 PST 2008


1.0u, 3612 Resist fried black at ET = 6:30, Ar = 15.0, Pressure= 12.5, RF= 100 W, Peak Volts= 700 V.  This is the same          recipe that I always use to etch 500A Pt.  Please check the    
cooling water and the pump in the basement.




More information about the mrc-pcs mailing list